C2.4 - High Resolution Capacitive Sensor Systems

Reinhold Hoenicka, AMA Association For Sensor Technology E.V., Sophie-Charlotten-Str. 15, 14059 Berlin, Germany
In the year 1791 scientists in France defined the length of one meter as a part of the circumference of the earth. Almost two hundred years later the meter was defined as a part of the speed of light. On the requirements of the industry and the developing of new technologies it is necessary again to see the world in a new scale. In a time, where you can buy computer chips, manufactured in micrometer technology, it is necessary to develop new processes for the future. The challenge is now the
more » ... lenge is now the nanometre with the addiction to picometres. To fulfil the needs of the semiconductor industry, the developers of Micro-Epsilon are able to measure sub-nanometres only 25 years after the latest definition of the meter. The size of one nanometre is approximately the length of four neighboured atoms. In fact, it is possible to detect movements in a size of one hydrogen atom.
doi:10.5162/sensor09/v1/c2.4 fatcat:feh5232jjzae7gz6ck66iqvs5e