In this paper, we propose a stochastic approach for the analytical analysis of the multicarrier multipactor discharge occurring in high-power vacuum microwave devices, in which electric fields are not homogeneously distributed. We indicate that the statistical behavior of large amount of secondary electrons in the process of a multipactor discharge can be well described by the probabilistic random walk and Levy walk theory. Based on the derived probability density of the lateral diffusion of

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... ondary electrons in homogeneous fields, the multicarrier multipaction in inhomogeneous fields can be analytically computed with significantly enhanced efficiency. As a demonstration, the accumulation of secondary electrons of a multicarrier multipaction in a rectangular waveguide supporting TE 10 mode is given. The theoretical results comply well with the results achieved by the time-consuming particle simulation, the slope difference of which is less than 0.8%, while only costs one-order less computational time. To the best of our knowledge, this is the first time that the probability density of the lateral diffusion of secondary electrons during a multipaction is theoretically derived. This density depicts the physical picture of the statistical movement of secondary electrons during the process of a multicarrier multipactor, which can be widely used in the areas of high-power electronics and electromagnetism.