Graphene is a key material for gas sensing applications owing to its high specific surface area and vast chemical modification potential. To fully utilize the potential of graphene, a sensing platform independent of conductive properties is required. In this study, we employed membrane-type surface stress sensors (MSS)—A kind of nanomechanical sensor operated in the static mode—As a sensing platform and utilized graphene oxide (GO) as a gas sensing material. MSS detect surface stress caused by

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... as sorption; therefore, chemically modified graphene with low conductivity can be utilized as a gas sensing material. We evaluated the sensing performance of a GO-coated MSS by measuring its responses to five gases. We demonstrated with the GO-coated MSS the feasibility of GO as a gas sensing material for static mode nanomechanical sensors and revealed its high selectivity to water vapor. Moreover, we investigated the sensing mechanism of the GO-coated MSS by comparing it with the sensing performance of MSS coated with reduced graphene oxide and graphite powder and deduced key factors for sensitivity and selectivity. Considering the high sensitivity of the GO-coated MSS and the compact measurement system that MSS can realize, the present study provides a new perspective on the sensing applications of graphene.