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High-Q microfluidic cavities in silicon-based two-dimensional photonic crystal structures
2008
Optics Letters
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We demonstrate postprocessed microfluidic double-heterostructure cavities in silicon-based photonic crystal slab waveguides. The cavity structure is realized by selective fluid infiltration of air holes using a glass microtip, resulting in a local change of the average refractive index of the photonic crystal. The microcavities are probed by evanescent coupling from a silica nanowire. An intrinsic quality factor of 57,000 has been derived from our measurements, representing what we believe to
doi:10.1364/ol.33.002206
pmid:18830353
fatcat:ma7i6ldazffi3ocnjopwwai6t4