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<p><strong>Abstract.</strong> The paper presents an innovative design of fast tool servo (FTS) by combining compliant mechanism (CM) and precision engineering (PE) so as to meet the stringent requirements of a one degree of freedom (1DOF) compact FTS. The design requirements of the FTS include: (a) 1 nm resolution, (b) 10&ndash;20 &mu;m of range, (c) first natural frequency of over 1400 Hz, (d) compatibility with holding different diamond cutting tools, and (e) without fatigue of thedoi:10.5194/ms-2-139-2011 fatcat:vkywc4crg5cdxdke32bkhgouly