Decomposição de precursores metalorgânicos: uma técnica química de obtenção de filmes finos

Oswaldo Luiz Alves, Célia Machado Ronconi, André Galembeck
2002 Química Nova  
Recebido em 6/7/00; aceito em 16/5/01 METALLO-ORGANIC DECOMPOSITION: A CHEMICAL APPROACH TO THIN FILM DEPOSITION. This review focus the more relevant foundations and applications of the Metallo-Organic Decomposition (MOD) technique, mainly within the last decade. The technique has grown significantly, mainly due to the good results concerning the preparation of multicomponent oxide systems with composition, structural and morphologic control, in a relatively simple way. This opened new
more » ... opened new opportunities to obtain materials with well-defined electrical and optical properties.
doi:10.1590/s0100-40422002000100013 fatcat:6bbm6zjsdvaczcuuqemqezf53q