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Recebido em 6/7/00; aceito em 16/5/01 METALLO-ORGANIC DECOMPOSITION: A CHEMICAL APPROACH TO THIN FILM DEPOSITION. This review focus the more relevant foundations and applications of the Metallo-Organic Decomposition (MOD) technique, mainly within the last decade. The technique has grown significantly, mainly due to the good results concerning the preparation of multicomponent oxide systems with composition, structural and morphologic control, in a relatively simple way. This opened newdoi:10.1590/s0100-40422002000100013 fatcat:6bbm6zjsdvaczcuuqemqezf53q