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In this work several structural and chemical properties of self-assembled InAs islands grown on GaAs(001) are studied using surface x-ray scattering with synchrotron radiation. The technique of x-ray diffraction under grazing incidence condition was employed to differentiate coherent and incoherent islands. We used a model of a strained pyramidal island to interpret the x-ray results and correlate size and strain-state of these islands. The degree of GaAs interdiffusion in the islands wasdoi:10.1590/s0103-97332004000400009 fatcat:efnefl5p4jdevfdjc4qpkwek24