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Profile Uncertainty Estimation for Roundness Measurements of Glass Hemisphere Using the Multistep and Phase Combination Methods
2013
Transactions of the Society of Instrument and Control Engineers
In order to evaluate the performance of ultraprecision machining, precise and accurate roundness or form profile measurements of a glass hemisphere are required. In such measurements, the multistep method is a commonly used self-calibration method. This method allows the roundness error of the workpiece to be separated from the spindle error of the machine. Recently, the phase combination method has also been used for high-accuracy measurements. This method produces results equivalent to those
doi:10.9746/sicetr.49.386
fatcat:26udl3ppjzgd5gfs5yme5hvqhy