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Sub-micromachining using femtosecond pulse laser interference phenomenon
[thesis]
This research work sets out to achieve submicromachining capabilities on the femtosecond pulse laser which surpasses the conventional laser micromachining method of using the direct laser beam to machine. The aim is to achieve laser ablated features of 200nm and below with this novel research concept. With ultrafast pulse lasers such as the femtosecond pulse laser, subspot size micromachining is possible because of their precise threshold value. However, the sub-spot size ablation mechanism has
doi:10.32657/10356/36144
fatcat:fr5mzbzaszf7joqp5mx4hjjlle