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The development of portable electronic devices has greatly stimulated the need for miniaturized power sources. Planar supercapacitors are micro-scale electrochemical energy storage devices that can be integrated with other microelectronic devices on a chip. In this paper, we study the behavior of microsupercapacitors with in-plane interdigital electrodes of carbon nanotube array under sinusoidal excitation, step voltage input and sawlike voltage input. Considering the anomalous diffusion ofdoi:10.3390/en13010213 fatcat:oazmr64l4fd6bgkcyrz3oxtame