A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems

Antoine Ferreira, Sumeet S. Aphale
2011 IEEE Transactions on Systems Man and Cybernetics Part C (Applications and Reviews)  
In the current times, MEMS and NEMS form a major inter-disciplinary area of research involving science, engineering and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This work presents a review of the emerging advances in the modeling and control of these micro-and nanoscale devices and converges on the exciting research in onchip control, with a mechatronics
more » ... nd controls perspective and concludes by projecting future trends.
doi:10.1109/tsmcc.2010.2072779 fatcat:qkg5btld4zbsdlhqtzauxqckbe