Design and performance of a test rig for evaluation of nanopositioning stages

Andrew Yacoot, Petr Klapetek, Miroslav Valtr, Petr Grolich, Herve Dongmo, Giovanni M Lazzerini, Angus Bridges
2019 Measurement science and technology  
Nanopositioning stages are used in many areas of nanotechnology and advanced materials analysis, often being integrated into analytical devices such as scanning probe and optical microscopes and manufacturing devices (e.g. lithographic systems). We present a metrological instrument, together with software, designed for traceable evaluation of stage performance. The system capabilities and performance are illustrated by measurement of stages of different levels of accuracy, including a low cost
more » ... cluding a low cost custom built stage manufactured by 3D printing. The traceability of the system is described and main uncertainty sources are discussed. Guidelines are given for the specification of stage performance.
doi:10.1088/1361-6501/aafd03 fatcat:u6gcuao7sbhljcimmhq7i3qhra