The parallel mechanism has become an alternative solution when micro manipulators are demanded in the fields of micro manipulation and micro assembly. In this paper, a three-Degree-Of-Freedom (3-DOF) parallel micro manipulator is presented, which is directly driven by three micro gas bubbles. Since the micro gas bubbles are generated and maintained due to the surface tension between the gas and liquid media, the proposed novel system can be used in the liquid environment which allows for

more »

... n about X and Y axis and translation in Z axis. In this paper, the conceptual design of micro gas bubble-based parallel manipulator is introduced and the input/output characteristic of the actuator is analyzed in detail. The kinematics model of the parallel micro manipulator is also established, based on which the workspace and the system motion resolution are analyzed as a criteria and reference for future prototype development.