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Fan-out wafer level packaging (FOWLP) is one of the latest packaging trends in microelectronics. Besides technology developments towards heterogeneous integration, including multiple die packaging, passive component integration in packages and redistribution layers or package-on-package approaches, larger substrate formats are also targeted. Manufacturing is currently done on a wafer level of up to 12"/300 mm and 330 mm respectively. For a higher productivity and, consequently, lower costs,doi:10.14279/depositonce-9483 fatcat:xl5ab5jyhveidft7xoo4fnjf7e