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High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with a resolution as low as a few nanoradians, with bandwidths as high as several kilohertz. In most demanding applications, the actual performance of these instruments needs to be characterized. The best angular measurement instruments available today do not sufficient resolution and/or bandwidth to satisfy these needs. At thedoi:10.3390/s20247034 pmid:33316894 fatcat:yzh5k7fkzrhxlj57plipg364qy