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During the last three years, the performance of Frequency Scanning Interferometry, accurate to a few micrometres, has been evaluated at CERN in the frame of the PACMAN project. Improvements have been studied and tested to make it better suited for typical alignment and survey conditions in accelerators and experiments. The results of these developments and tests, coupled with the multi-channel capability of the system, and its compactness which eases its integration in the area to be surveyed,doi:10.18429/jacow-ipac2018-wepaf069 fatcat:v5tsqjeg3vfzxh6q4rnqamztsq