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Samarium-doped ceria (SDC) and gadolinium-doped ceria (GDC) thin films were formed by e-beam vapor deposition on SiO2 substrate, changing the deposition rate and substrate temperature during the deposition. X-ray diffraction (XRD), scanning electron microscopy (SEM), and energy dispersive X-Ray spectrometry (EDS) were employed in order to investigate the structure ad morphology of the films. A single Raman peak describing the structure of undoped CeO2 was observed at a frequency of 466 cm−1.doi:10.3390/coatings10050432 fatcat:4bsm333f5bdnzm4c5u5t6un7rm