FABRICATION OF 3D PARYLENE SHEATH PROBES FOR RELIABLE NEUROPROSTHETIC RECORDINGS

J.T.W. Kuo, B.J. Kim, S.A. Hara, C. Lee, C.A. Gutierrez, T. Hoang, E. Meng
2012 2012 Solid-State, Actuators, and Microsystems Workshop Technical Digest   unpublished
3D Parylene sheath probes having Pt electrodes on the outer and inner surfaces of the sheath are introduced as a novel interface for long term intracortical neural recording. Surface micromachined Parylene channels with Pt electrodes are expanded into a 3D sheath structure by thermoforming in the presence of a custom tapered microwire that shapes the sheath. Electrochemical characterization, including electrochemical impedance spectroscopy (EIS) and cyclic voltammetry (CV), of the Pt electrodes
more » ... f the Pt electrodes sites was performed. EIS yielded electrode impedances ranging from 20-60 kΩ at 1 kHz. Electrode characterization results suggest the thermoforming process does not impact electrode performance and were in agreement with characteristics of typical neural recording electrodes. These sheath probes with their 3D structural design, soft biocompatible materials, and bioactive coatings promote integration with neural tissue enabling reliable, long term cortical recordings.
doi:10.31438/trf.hh2012.9 fatcat:vjvbqjv6gzcvvkzakcfulz2k3m