Assembly of 3D Reconfigurable Hybrid MOEMS through Microrobotic Approach [chapter]

Kanty Rabenorosoa, Sylwester Bargiel, Cédric Clécy, Philippe Lutz, Christophe Gorecki
2010 Frontiers of Assembly and Manufacturing  
Micro-assembly has been identified to be a critical technology in the microsystems technology and nanotechnology. Increasing needs of MOEMS (Micro-Opto-Electro-Mechanical Systems) for microsystems conducts to development of new concepts and skilled micro-assembly stations. This paper presents a 3D microassembly station used for the reconfigurable free space micro-optical benches (RFS-MOB) which are a promising type of MOEMS. Designed parts of RFS-MOB are assembled by using the developed
more » ... e developed micro-assembly station. The flexibility of the micro-assembly station provides the possibility to manipulate a variety of microcomponents. The RFS-MOB design enables to reduce adhesion forces effects during releasing operations. Experimental results are shown and validate the effectiveness of the micro-assembly station and micro-assembly strategies.
doi:10.1007/978-3-642-14116-4_9 fatcat:enqn2fpwbzaabi7ova4q2izare