MEMS module integration into SiGe BiCMOS technology for embedded system applications

Mehmet Kaynak, Vaclav Valenta, Hermann Schumacher, Bernd Tillack
2012 2012 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (BCTM)  
doi:10.1109/bctm.2012.6352617 fatcat:lxb3u7xvuzec3lzbst5vqw66du