Anisotropy in the wet thermal oxidation of AlGaAs: influence of process parameters

Gaël Lafleur, Guilhem Almuneau, Alexandre Arnoult, Henri Camon, Stéphane Calvez
2018 Optical Materials Express  
The crystallographic anisotropy of the lateral selective thermal oxidation of AlGaAs alloys is experimentally studied. The anisotropic behavior of this oxidation process, used primarily for building a lateral confinement in vertical surface emitting lasers (VCSEL), is quantified by varying different process parameters and the geometrical shapes of laterally oxidized mesa structures. This experimental study aims to have a better control of the oxide aperture shape used in oxide-confined
more » ... e-confined photonics devices.
doi:10.1364/ome.8.001788 fatcat:kzrhyqtewnc5vjiwu5ntttanqe