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The crystallographic anisotropy of the lateral selective thermal oxidation of AlGaAs alloys is experimentally studied. The anisotropic behavior of this oxidation process, used primarily for building a lateral confinement in vertical surface emitting lasers (VCSEL), is quantified by varying different process parameters and the geometrical shapes of laterally oxidized mesa structures. This experimental study aims to have a better control of the oxide aperture shape used in oxide-confineddoi:10.1364/ome.8.001788 fatcat:kzrhyqtewnc5vjiwu5ntttanqe