The feasibility of micromechanical optical and infrared (IR) detection using microcant&@@ 7 P ,r-, for visible and infrared radiation that are smaller. more sensitive and lower in cost than quantum or t detectors. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress ~~ ; ; a originating from the bimetallic effect. Bending is proportional to the amount of heat absorbed and ca detected using optical or electrical methods such as resistance changes in

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... iezoresistive cantilevers. microcantilever sensors exhibit two distinct thermal responses: a fast one (~lfhe~' < ms) and a slower one (7Pmafloins). A noise equivalent temperature difference. NEDT = 90 mK was measured. When uncoated microcantilevers were irradiated by a low-power diode laser ( A = 786nm) the noise equivalent power, NEP. was found to be 3.5nW/&which corresponds to a specific detectivity, D*. of 3.6 x IO7c,n. &/W at a modulation frequency of 20 H:. demonstrated. Microcantilevers provide a simple means for developing single-and multi-element sensors Q@n 244 M P Q 3 8 . 9 -/ "The submitted manuscnpt has been aulhored by a contractor of d e US. Government under contract no DE-AC05-960R22464. ccordingly. the U.S. Government retains a nonexclusive. this contribution or allow other to do so, for US. Government OCUb!Em 4 8 @&&%mtyally-free license to publish or reproduce the published form Of via PUrpOseS."