Evaporation Characteristics of Electron Beam Gun Heated Sources

Paul C. Baynes, T. Nagarajan
1984 ElectroComponent Science and Technology  
Exact expressions for the thickness profile of thin films deposited using electron beam gun heated sources are obtained in terms of the source-substrate geometry. Calculations based on conical and cylindrical indentations show the latter to be more realistic. Self-masking effects at the source are taken into account.
doi:10.1155/apec.11.175 fatcat:g35dh5czgrdg5gzystxarih7my