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The work discusses procedure peculiarities of thin films, surface layers and liquid dry residue elements diagnostics. There are showed that the ion beam analysis embellished by TXRF method is necessary and sufficient for element analysis of material surface layers. Experimental data of thin film surface layers obtained by TXRF, RBS and PIXE methods are presented.doi:10.1088/1742-6596/1281/1/012011 fatcat:4oxld4tuqfdzdcqdgmflumlfoa