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30th European Microwave Conference, 2000
A novel hybrid micromachined resonator with high quality factor and small size at 5.8GHz is presented. The design of the resonator is based on a micromachined cavity filled with a high dielectric constant material. Energy is coupled into the cavity from input and output microstrip lines via slots. It is shown experimentally that the limiting factor in achieving a higher Q with the given dielectric materials is the dielectric loss. This resonator provides a low cost, minimum size and compactdoi:10.1109/euma.2000.338674 fatcat:dwxlzgdudfa4pe2lyaf7k5moqe