Analysis of U shaped MEMS Micro cantilever using COMSOL

2020 International journal of recent technology and engineering  
This paper explains about analysis of U shaped MEMS cantilever with silicon substrate using COMSOL Multiphysics software. This U shape cantilever structure is made of silicon and on that different layers are incorporated. U shape cantilever will have high beam length and this design can meet any requirements with allowable strain limits.
doi:10.35940/ijrte.f7453.038620 fatcat:yaxlrsjdfvfpni5kcvm2oyjuy4