Three-Dimensional Simulations with Fields and Particles in Software and Inflector Designs

Branislav Radjenović, Marija Radmilović-Radjenović, Petar Beličev
2013 Journal of Software Engineering and Applications  
Particles and fields represent two major modeling paradigms in pure and applied science at all. In this paper, a methodology and some of the results for three-dimensional (3D) simulations that include both field and particle abstractions are presented. Electromagnetic field calculations used here are based on the discrete differential form representation of the finite elements method, while the Monte Carlo method makes foundation of the particle part of the simulations. The first example is the
more » ... irst example is the simulation of the feature profile evolution during SiO 2 etching enhanced by Ar + /CF 4 non-equilibrium plasma based on the sparse field method for solving level set equations. Second example is devoted to the design of a spiral inflector which is one of the key devices of the axial injection system of the VINCY Cyclotron.
doi:10.4236/jsea.2013.68048 fatcat:r6vkebmzi5aklmclx3j4qk2r3y