Effect of the Substrate Temperature on the Structural and Morphological Properties of MoO2 Thin Films Obtained by Pulsed Injection MOCVD

R Narro-García
2017 International Journal of Electrochemical Science  
Molybdenum oxides is of great technological interest due to their outstanding optical, electronic and catalytic properties. In this work, molybdenum dioxide (MoO 2 ) thin films were deposited onto Si wafers and stainless steel substrates at different substrate temperatures. The growth of the films was achieved by using a vertical metal organic chemical vapor deposition reactor working in pulsed injection mode. A powder of molybdenum hexacarbonyl mixed in a toluene solution was used as
more » ... s used as precursor. An effective pulsed injection system to supply the precursor, usually used for fuel injection in internal combustion devices, delivers a precise amount of liquid precursor to the reactor through injectors, whose pulse intervals (injection frequency) are controlled by a computer-driven system. The use of a liquid solution as precursor along with the experimental parameters provide thermodynamically favorable conditions to fabricate a thin solid film, homogenously deposited onto the whole substrate. The MoO 2 film structure and morphology were studied by X-ray diffraction, Raman scattering spectroscopy and scanning electron microscopy. Moreover, a comparative study was undertaken whereby the catalytic activity of stainless steel substrate for hydrogen evolution reaction was related to that of MoO 2 thin film.
doi:10.20964/2017.05.51 fatcat:uaiccjua3jgs5f2tdaaomkgoxi