Micro- and Nano-fabrication of Stimulus-responsive Polymer using Nanoimprint Lithography

Yoshiyuki Yokoyama, Makiko Umezaki, Takahiro Kishimura, Eiichi Tamiya, Yuzuru Takamura
2011 Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)  
Figure 4 shows scanning electron micrographs of micropatterned Bio-resist films, fabricated by thermal nanoimprinting. These results confirm the suitable transfer of nano-and micro-patterns at scales from 90 nm to 10 µm.
doi:10.2494/photopolymer.24.63 fatcat:bh7wjnmqjnfkhd34uoxrevmspm