Mechanical scanning probe nanolithography: modeling and application

P. M. Lytvyn
2012 Semiconductor Physics, Quantum Electronics & Optoelectronics  
The paper presents a study on modeling the mechanical interaction between the tip of a scanning atomic force microscope (AFM) and surfaces of various types, which makes it possible to optimize parameters and modes for mechanical AFM nanolithography. The practical assessment of mechanical nanoprobe lithography based on the method of a direct surface patterning was carried out during fabrication of functional elements for molecular electronics. Polymethine dye nanowires of a specified
more » ... ecified configuration and the cross-section 3×20 nm have been successfully formed in a multilayer polytetrafluoroethylene/gold/silicon nanostructure.
doi:10.15407/spqeo15.04.321 fatcat:ca2mfhp74jbdphoose4lzq4ym4