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Wafer scale arrays of nanostructured titania ͑NST͒ sensing elements have been fabricated using standard microfabrication techniques. Sensing elements are 20 m on a side and formed by the oxidation of titanium thin films in aqueous hydrogen peroxide. NST elements are highly sensitive to oxygen, but only slightly sensitive to hydrogen. High sensitivity to hydrogen is achieved by modification of the sensors with platinum. A platinum salt solution is introduced to the NST sensor elements anddoi:10.1149/1.2969284 fatcat:jxdx7kxdkfgkvj766wiq2pfxbu