Design, construction, and operation of a laboratory scale reactorfor the production of high-purity, isotopically enriched bulksilicon [report]

J.W. Ager III, J.W. Beeman, W.L. Hansen, E.E. Haller
2004 unpublished
doi:10.2172/862010 fatcat:m4hf6z4ahfhuxbe7kosm7aeebm