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In this paper we describe and evaluate a 3D hybrid power management architecture which makes use of Nano-Electro-Mechanical Field Effect Transistors (NEMFET) as power switches that cut-off the power supply of inactive blocks. 3D stacking combines the appealing extremely low leakage currents of the NEMFETs with the versatility of CMOS technology bydoi:10.1109/nanoarch.2011.5941505 dblp:conf/nanoarch/VoicuEC11 fatcat:7mennzjksje2bksqgkyxbqj2i4