Coating of Si Nanowire Array by Flexible Polymer

Hee- Jo An, Seung-jin Lee, Taek-soo Ji
2016 unpublished
Using a suitable material chloroform solubility of PDMS (polydimethylsiloxane) and PDMS" by adjusting the concentration of the PDMS, the development process of the two kinds of fused by applying a PDMS between a wire between the Nanowire in micros previously. Hybrid biomimetic tactile sensors based on silicon and poly rounded up all of the lead-based benefits. In addition, there is a derived problem easily applied using HMDS.
doi:10.14257/astl.2016.139.84 fatcat:vxnbtwoqfjcdtjtdqjp23vpkme