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Analysis of the Effect of Phosphorus Doping on the Lifetime of the Single Crystal Silicon Micro-beam Based on Paris Formula
Journal of Mechanical Engineering
Abstract:Single-crystal silicon structures in silicon-based micro-electro-mechanical systems are usually exposed to cyclic stresses, which, consequently, may fail easily because of mechanical fatigue. There's a great gradient in the fatigue lifetime of the single crystal silicon micro-structures, thus rendering it hard to make out how the phosphorus impurities affect the fatigue properties by comparing the fatigue lifetime of specimens with different doping concentrations. This research aims atdoi:10.3901/jme.2014.24.086 fatcat:k7jvqyzeybe6pchoai4tuul6oi