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Mechanical parameters selection in InSb focal plane array detector normal direction
2012
Wuli xuebao
In order to learn the effects of front surface structural defects and back surface thinning process on the InSb chip deformation, its elastic modulus along normal direction is reduced in InSb structural modeling, and based on the typical strain character appearing under thermal shock, the mechanical parameter selection basis is deduced in this paper. Simulation results show that when the out-of-plane elastic modulus of InSb chip is set to be 30 percent Young's modulus, both the maximum Von
doi:10.7498/aps.61.226103
fatcat:5cop3ovxbvdsbovkfw6vnqrwxi