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Fabrication of a Novel Ta(Zn)O Thin Film on Titanium by Magnetron Sputtering and Plasma Electrolytic Oxidation for Cell Biocompatibilities and Antibacterial Applications
2020
Metals
Pure titanium (Ti) and titanium alloys are widely used as artificial implant materials for biomedical applications. The excellent biocompatibility of Ti has been attributed to the presence of a natural or artificial surface layer of titanium dioxide. Zinc oxide and tantalum oxide thin films are recognized due to their outstanding antibacterial properties. In this study, high power impulse magnetron sputtering (HiPIMS) was used for the deposition of tantalum oxide and zinc-doped Ta(Zn)O thin
doi:10.3390/met10050649
fatcat:flypfzdnmnefta6ixxhjcmklnq