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With the great progress of production processÿMEMS have applied to a lot of areas in recent yearsÿand today they have become "fundamental devices"ÿwhich are comparable with the IC. In this paperÿwe first discuss the main distinct advantages of MEMS as well as the important differences between MEMS and ICÿthen some latest research progresses on biomedical, environmental and microfluidics applications of MEMS are reviewed. Finally, possible future developments of BioMEMS are prospected. fatcat:6ht6ba6sb5db5fatbpmuzzwk5y