Structural properties of fluorinated amorphous carbon films

X. Wang, H. R. Harris, K. Bouldin, H. Temkin, S. Gangopadhyay, M. D. Strathman, M. West
2000 Journal of Applied Physics  
Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm Ϫ1 were resolved into ten peaks, which were assigned to various carbon-fluorine and carbon-carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp 2 ) concentration is
more » ... ) concentration is demonstrated.
doi:10.1063/1.371910 fatcat:wt4svozubvakhmbduguushby7m