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ELECTRONIC TRANSPORT PROPERTIES CHARACTERIZATION OF SILICON WAFERS BY MODULATED PHOTOREFLECTANCE
1991
Journal de Physique IV : Proceedings
We have used the photoreflectance technique to characterize electronical transport properties of silicon wafers. By using the intermediate frequency range (1 kHz to 100 kHz) and selecting a proper excitation wavelength, it is possible to facilitate the characterization. In particular we show that this technique permits the determination of surface recombination velocity.
doi:10.1051/jp4:1991642
fatcat:awoz7ffji5dmxm6dgydh27s3p4