中空格子構造金型によるUVナノインプリント時の樹脂の充填挙動の観察
Observation of Filling Behavior in UV-nanoimprinting Using a Mold with Hollow Grid Structure

Ken-ichi Machinaga, Jun Taniguchi, Noriyuki Unno, Nobuji Sakai, Takeshi Ohsaki
2009 Seikei-Kakou  
doi:10.4325/seikeikakou.21.346 fatcat:sounotmjajeafchvjhtuzhhasa