Very Wideband Automated On-Wafer Noise Figure And Gain Measurements At 50-110

T Vähä-Heikkilä, M Lahdes, M Kantanen, T Karttaavi, J Tuovinen
On-wafer noise figure and insertion gain measurement set-ups have been developed over 50-110 GHz frequency range. Wafer scale noise figure and insertion gain measurements can be done in an automatic manner using PC controlled automated probe station and in-house written software. In narrow band measurements, large systematic errors may remain undiscovered. These errors are usually caused by reflections in the set-up, which are difficult to calibrate out. Wideband measurements are often the only
more » ... are often the only method, which can efficiently reveal these errors. This aspect is increasingly important as frequency increases.