Buffer Management For Automated Material Handling Systems In Semiconductor Industries

C. Fischmann, F. Böttinger, R. Wertz, C. Kunz
2008 ECMS 2008 Proceedings edited by: L. S. Louca, Y. Chrysanthou, Z. Oplatkova, K. Al-Begain   unpublished
The automated material handling system (AMHS) is a highly automated transport solution of actual 300mm semiconductor waferfabs. The big logistic challenge in such a running system is the just-in-time delivery of lots (carriers). Therefore, beside tracks and vehicles, there are different storages (stocker) and buffers (under track storages and load ports) integrated in such a transport system. To conquer the logistic challenge, an optimum allocation and control strategy for all storage equipment
more » ... l storage equipment is required. This paper describes the investigation of different storage and buffer strategies based on detailed simulation models of a dedicated semiconductor factory area.
doi:10.7148/2008-0423 fatcat:gldfek7krzcojfduz5wdlysade