A 2D finite element analysis of capacitive micromachined ultrasonic transducer (CMUT) is proposed taking into account radiation in air and water. Different CMUT element geometries circular, square and hexagonal have been considered for FEM simulations. FEM simulation software COMSOL is employed to determine the structural deflections caused by electrostatic forces. Since the structural deformation alters the electrostatic field, a coupled-field simulation is required wherein the electrostatic

more »

... sh is continuously updated to coincide with the deflection of the structure. In this paper the deflection profile, resonance frequency, material parameters and collapse mode characteristics are being compared with device in air and under water. The CMUT is an electromechanical system, therefore, the physics of electrical and structural mechanics is coupled to describe its dynamics. Maximum frequency of operation is obtained by deriving the time evolution of the device for several frequencies.