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Atomic force microscopy using a novel on-chip interferometric readout
[article]
2018
Preserved Fulltext
Currently, the most common readout approaches for atomic force microscopy (AFM) systems are based on the optical beam deflection (OBD) technique. OBD relies on monitoring the deflection of the sensing cantilever probe by measuring the position of the laser beam reflected from the free end of the cantilever using two or more detectors. Alternative AFM readouts consist of electrical readouts, including piezoelectric solutions and tuning fork probes. Although the OBD readout approach achieves
doi:10.26182/5b4c004492276
fatcat:bthjumizhje4hkzei3srf52t3a