Computer Study of a Cascade Static Lens Gauge using the Software "SIMION 3D"(II)
計算ソフトウェア「SIMION」によるCascade Static Lens Gaugeの解析(II)

Makoto TANAKA, Toshio URANO, Toru KANAJI
1998 Shinku  
The cascade static lens gauge (CSL gauge) has been developed for the measurements of the total pressure in extremely high vacuum range. A simulation software "SIMION 3D" was used for the calculation of electric potential contours and of ion trajectories in the gauge. Then it was found that the gauge sensitivity can be increased when the "true ion" collection yield is enhanced by readjustment of the electrode-potentials. And found also that the effect of ESD ions can be considerably reduced by
more » ... reful change of the geometries of several electrodes.
doi:10.3131/jvsj.41.143 fatcat:pzr67ppzyve3xdz7skwc6u4txa