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Magnetic Properties of Fe- and Mn-Implanted SiC
2001
Electrochemical and solid-state letters
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p-Type 6H-SiC substrates were implanted with Mn ϩ or Fe ϩ at doses of 3-5 ϫ 10 16 cm Ϫ2 under conditions that avoided amorphization ͑substrate temperature ϳ350°C͒. After annealing at 700°C, the magnetic properties of the samples were examined by superconducting quantum interference device magnetometry. Both the Fe-and Mn-implanted samples showed ferromagnetic properties up to approximately 250 K for the highest doses employed. The origin of the ferromagnetism is not the formation of secondary phases involving precipitation of Fe or Mn.
doi:10.1149/1.1414945
fatcat:uhx432ink5ghnm5jzyj6d4mvzm