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Modeling of MEMS Resonator Piezoelectric Disc Partially Covered with Electrodes
American Journal of Mechanics and Applications
The Legendre polynomial method has been extended to the modeling of MEMS resonator disc partially covered with electrodes. The disc has been divided into two areas: one with electrodes and the other without electrodes. For each area, The Maxwell equations and the piezoelectric constitutive equations of motion are studied and solved to yield a frequency response and electrical behavior of the MEMS resonator applying a semi analytical method based on a Legendre polynomials series anddoi:10.11648/j.ajma.20160401.11 fatcat:lmoypvzc5rarhp3sn6tjohr3ry