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Distortion analysis of crystalline and locally quasicrystalline 2D photonic structures with grazing-incidence small-angle X-ray scattering
In this study, grazing incidence small-angle X-ray scattering (GISAXS) is used to collect statistical information on dimensional parameters in an area of 20 mm × 15 mm on photonic structures produced by nanoimprint lithography. The photonic structures are composed of crystalline and locally quasicrystalline two-dimensional patterns with structure sizes between about 100 nm and 10 µm to enable broadband visible light absorption for use in solar energy harvesting. These first GISAXS measurementsdoi:10.1107/s1600576719001080/rg5156sup1.html fatcat:4es5b5jqivgufmmf77pgwhcyo4