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Journal of the Japan Society for Precision Engineering
High Precision Flatness Measurement by Combining Two-Orientation Method and Radial Shift Method Shyunji ITox, Teruhiko HINAJI and Osamu HORIUCHI A study is presented of a high precision measuring method of flat form errors by combining two-orientation method and radial shift method, when a laser interferometer is applied. The method can remove the measuring errors due to the form errors of the reference surface. In the two-orientation method, two sets of data measured before and after adoi:10.2493/jjspe.58.883 fatcat:yof7l56ecfbaljpsb2vfs2lrni